Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab

A 300 mm generation automatic transport system, transport system with the "interbay and intrabay diverging and converging method" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.