Scale Factor Self-Calibration of MEMS Gyroscopes Based on the High-Order Harmonic Extraction in Nonlinear Detection

This article presents a novel self-calibration method to improve the scale factor (SF) stability by the synchronous control on the first-order and third-order harmonic components of nonlinear detection. On the conventional scheme of a drive loop, the readout amplitude of the first-order harmonic component is controlled at a constant value. However, the actual vibration amplitude of drive-mode motion would drift due to the change of circuit gains between the readout amplitude and actual amplitude, thereby resulting in the deterioration of the SF stability. The third-order harmonic component of nonlinear detection shares the same circuit with the vibration signal, indicating that its readout amplitude can track the change in circuit gains in real time. Therefore, this new approach replaces the original fixed reference with the varying readout amplitude of the third-order harmonic component to eliminate the drive-mode vibration error and eventually calibrate the drift of SF. Experiments performed on a honeycomb disk resonator gyroscope (HDRG) have demonstrated the feasibility of the calibration method. The calibration based on the harmonic extraction yields a short-term SF repeatability of 24.9 ppm and a long-term SF repeatability of 30.8 ppm. Allan deviation analysis of the calibrated SF demonstrates a 3.5-ppm precision upon an average of 200 s. The temperature sensitivity of the SF is reduced from 717.3 ppm/°C to 5.02 ppm/°C and the SF repeatability is improved from 15643 ppm to 94.9 ppm over the temperature range of −30 °C to 30 °C.