Design of a Liquid Dielectrophoresis-driven Platform with Cooperative Actuation

In this contribution, the design, fabrication and characterisation of a microactuator system based on a freely moving micromechanical platform resting on liquid bearings is demonstrated. The system is positioned laterally on a long scale as well as spatially adjusted by controlling the electrical field between planar electrode arrays. To proof the working principle of the actuator, the behaviour of microdroplets is examined under various configurations. Measurements with a platform on top of four droplets show the intended flexible movement of this platform.