300-GHz Back-Radiation On-Chip-Antenna Measurement with Electromagnetic-Wave-Absorption Sheet

A method is demonstrated to improve measurement accuracy for a back-radiation (inward-directed-radiation) on-chip antenna using a 300-GHz electromagnetic-wave absorption sheet. Electromagnetic-wave reflection owing to the material beneath a chip substrate occurs during the on-wafer measurement, leading to the input-impedance variance of that antenna at the feeding port, therefore, should be reduced using the method.