Diffraction-Limited Imaging Demonstration using a Silicon Integrated Array at Terahertz Frequencies

In this contribution we will present the diffraction-limited imaging capabilities of a focal plane array (FPA) of antenna-coupled direct-detectors at submillimeter wavelengths. The FPA prototype is a tightly sampled, 12-pixel array that was developed in a 22 nm CMOS technology and it covers a band from 200 GHz to 600 GHz. A quasi-optical (QO) setup was developed to actively illuminate this FPA in order to perform imaging with $\gt$ 40 dB SNR. The resulting images will be the first that have diffraction-limited angular resolution at these wavelengths, which demonstrates that this FPA design can be very attractive for future passive THz imaging applications.