Silicon Nitride Fabry-Perot Bragg Grating Nanoresonator with Ultrahigh Intrinsic Q

An ultra-high intrinsic quality factor (Q
int
) of 13 million for a Fabry-Perot Bragg grating resonator is demonstrated. The loss of the Si
3
N
4
waveguide platform is evaluated to be 0.018 dB/ cm.