Development of a compact NIR sensor using MEMS-FPI NIR spectral detectors

The subject of this paper is the design and development of a miniaturized NIR spectral sensor using MEMS-FPI NIR spectral detectors. Devices fabricated by the MEMS process allow the integration of mechanical components within a very limited package space. By using multiple MEMS-FPI NIR spectral detectors fabricated by this process, a very compact and equally cost-effective NIR spectral sensor can be developed, which can be used in various fields such as industrial manufacturing and processing, among others. In this paper focusing on the sensor concept, the NIR spectral sensor consisting of several spectral detectors, the signal processing as well as the control and pre-processing of the recorded NIR spectra by a microcontroller is explained in detail. In addition, the software unit is presented, which is connected to the sensor via an interface and takes over the control and evaluation of the measured spectra. To demonstrate the functionality of the sensor, an insight into multiple spectral measurements performed is given. The developed sensor is, by the integration of several MEMS-FPI spectral detectors, an innovative approach of a compact NIR spectral sensor.