Optimum Electrostatic Actuated Cantilever Type MEMS Capacitor

This paper describes the design, simulation and optimization of electrostatic actuated tunable MEMS capacitor, which are very important for radio frequency application in recent communication systems. Nodal analysis scheme is used to model the electromechanical behavior by solving the no-linear differential equations that describe the system. The capacitance introduced in the MENS structure is optimized and analysed at different values of geometrical parameters. The micro electromechanical parameters are optimized to achieve an optimum tuning ratio. The optimization results obtain a tuning ratio of 48:1 (0.04 pF:1.55 pF). This tuning ratio is relatively high for the cantilever type tunable capacitor while requiring applied voltage of 14V. The results are compared to other experimental data published and show a great significance than that produced by other cantilever type tunable capacitors.