Design features for polysilicon high pressure transducers

In this experimental work, polysilicon pressure transducers are designed with pressure-sensitive elements and applied for pressure over 5 MPa. To determine the magnitude of mechanical stress in the diaphragm, we defined gauge factors from longitudinal and transverse piezoresistors on console beam made from the same wafer as the diaphragm. Also, we modeled mechanical stress in the diaphragm by the finite element method (FEM) by taking into account not only the uniformly distributed load on the plate of diaphragm, but also the load on the lateral side of the diaphragm. The comparison of the calculated mechanical stress with the experimentally defined stress has shown a coincidence within 20% error bound.