Design of Multi-slotted Trapezoidal Cantilever for Low Frequency Devices

The MEMS-based energy harvester is designed using the principle of piezoelectricity for harvesting electrical energy from ambient vibration. The different cantilever structures have been designed to study different ways of reducing natural frequency and simultaneously improve the cantilever's stress distribution. The multi slotted cantilever gives better stress distribution and produces higher output voltage and power. The proposed multi slotted trapezoidal cantilever has the minimum resonant frequency of 61 Hz, which is 29.72 % less than the rectangular cantilever structure. The proposed design produces the output voltage and power of 13.8 V and 13.3 µW, 38 % and 18.75 % more than basic rectangular cantilever, respectively.