Monolithically Integrated AlGaInAs MQW Polarization Mode Converter Using a Stepped Height Ridge Waveguide

An AlGaInAs multiple-quantum-well (MQW) polarization mode controller (PMC) using a stepped height ridge waveguide is presented, which is monolithically integrated with a sidewall grating distributed feedback laser using quantum well intermixing (QWI). QWI is used to create a 100 nm blueshift in the PMC and to partially eliminate the anisotropy and birefringence of the MQW structure. The PMC structure is modelled and optimized using a 3D full-vectorial Finite-Element Method package. The maximum polarization conversion efficiency (PCE) is around 96% for a 537-μm-long PMC operating at a wavelength of 1550 nm. To maintain a PCE of ≥90%, the fabrication tolerances of the dry-etch corner and ridge waveguide widths are ± 0.05 μm and ± 0.03 μm respectively. The main advantages of the proposed design are that only a single step of MOPVE and two steps of dry etching are required for the whole integrated device, significantly reducing complexity and cost.