Influence of Annealing Temperature on ZrO2 Nanoparticles for Improved Photodetection

Zirconium dioxide (ZrO
₂
) nanoparticles (NPs) based device has been fabricated through glancing angle deposition (GLAD) technique. The field emission scanning electron microscopy (FESEM) images revealed that the NPs are agglomerated in high annealing temperatures (500°C and 800°C). The 800°C annealed device showed lesser dark current density, enhanced light current density, maximum responsivity (33 A/W), enhanced internal gain (85.96), maximum detectivity (
$1.96\,\times \,10^{9}$
Jones), and low noise equivalent power (NEP) (
$1.45\times 10^{-10}$
watt) than the 500°C annealed and unannealed devices. This annealed ZrO
₂
NPs based device can be used as a superior device for improved photodetection.