Performance Analysis, Design and simulation of Piezoresistive Pressure Sensor

In this paper, we created a Piezo-resistive Pressure Sensor based on MEMS technology to apply pressure to the sensor’s edge and studied the model’s pressure effects. The boundary currents, Piezo-resistance, and final structural equations at the domain level are all described in this model, which use structural equations to solve the final electrical equations on a thin layer that coincides with a boundary within the model’s geometry. When a pressure of l00kPa is applied on the substrate, a maximum displacement of $7 \times 10-30$ $\mu m$ is measured.