A 16-nW-57-dBm Sensitivity Wakeup Receiver Using MEMS-Based Matching Network

This letter presents a nanowatt-level detector-first wakeup receiver using microelectromechanical system (MEMS)-based matching network (MN). The aluminum nitride (AlN) piezoelectric MEMS resonator is utilized to implement the impedance MN for high passive gain to improve the receiver sensitivity. The high-
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MEMS-based MN also greatly improves the receiver’s out-of-band interference rejection. Gate-biased envelope detector (ED) with small input capacitance is used for RF-to-baseband direct conversion. The wakeup receiver is implemented in a 180-nm CMOS process. It obtains −57-dBm sensitivity with 1-kbps ON-OFF keying (OOK) data rate at 789 MHz while consuming only 16-nW power consumption.