Mm-Scale Focal Length Tuning in Mems-Integrated Meta-Optics

We present a miniature varifocal lens incorporating comb-drive actuators and ultrathin Alvarez meta-optics of a 0.5 mm aperture to operate at 1550 nm wavelength. It produces a large focal length tuning range of 3.1 mm (200 diopters) with actuation voltages below 40 V, realizing efficient optical power modulation at low energy consumption in a compact package. The entire device utilizes common semiconductor materials and fabrication technologies, making it amenable for potential electronic integration and high-throughput production for a wide range of commercial applications.