Matching Network-Boosted 36% Scaln Pmut Linear Array

In this work, we present a technique to increase the performance of piezoelectric micromachined ultrasound transducer (pMUT) arrays by integrating a MEMS-based matching network (MN) in the transducer's architecture. The MN facilitates the recovery of the reactive power accumulated between the pMUT electrodes, thus passively boosting the voltage across them. The higher voltage increases the pressure the device can generate, when used as transmitter, and enhances its sensitivity, when used as receiver. In this study, we show simulations of the voltage gain for two separate MN types: an inductor and a MEMS resonator. Our analysis is validated experimentally on a 10-element Sc
0.36
Al
0.64
N pMUT linear array operating in transmission at 1.93 MHz over-the-air. An off-chip 138 µH inductor and a commercial off-the-shelf ceramic resonator were utilized as MNs to passively increase the pMUTs displacement by a factor of 3.5 and 11, from 20 nm/V to 70 and 225 nm/V, respectively.