Preparation and Properties Characterization of Nano-Composite Scaffold Getter With Induction Heating

In MEMS manufacturing process, the device level vacuum package is the key to the performance of high precision resonant devices. Non-evapotranspiration getter (NEG) is widely used in the field of MEMS vacuum packaging, the development of vacuum packaging devices is restricted by the low adsorption capacity and long activation time of 2D planar thin film getter. In view of this article, a composite porous nano-scaffold getter which can be activated rapidly by induction heating was proposed. Based on the model of equal field intensity and volume expansion, the experimental platform of anodic oxidation device was built. Through experimental investigation, the Si-Ni-Al composite nano-scaffold with a pore distance of 750 nm and a pore diameter of over 650 nm was finally prepared. The test results showed that the prepared composite porous nano-scaffold base getter could be heated to over 700 °C by micro-flexion induction within 15s to realize the activation and reactivation of the Ti film getter. The composite porous nano getter can adsorb gas molecules with a mass of 20.04 mg with a maximum adsorption rate of $123.703 \times {10^{ - 4}}{\boldsymbol{mg}}/({{\boldsymbol{s}}.{\boldsymbol{g}}})$. Therefore, the composite scaffold getter can effectively solve the contradiction of between the high temperature resistance of MEMS and the activation temperature of getter, also can solve the contradiction between small package size of MEMS device and large adsorption capacity of getter.