Low-Cost Fabrication of Micro Elastofluidic Systems with Integrated 3D-Shaped Electrodes for Particle-Based Separation Processes

Microfluidic systems as emerging technology are of paramount importance for biomedical applications such as Point-of-Care-Diagnostics (POC). An immense challenge in this context is the development and equally cost-efficient fabrication of these micro systems. Embedded channels with dimensions of a few hundred nanometers up to micrometer scale for manipulation of particles, cells or bacteria in liquid media, are indispensable for a reliable analysis of small sample volumes. In that regard, a realisation of electrohydrodynamic (EHD) processes like dielectrophoresis (DEP) is mandatory. Beside complex physical interrelations, a novel category of microfluidic systems called micro elastofluidics expands the conglomerate of technical and medical requirements considerably. Therefore, this work focusses on a low-cost fabrication process developed beyond cleanroom environment for realization of elastic microfluidic devices. The method based on thermoplastic deformation of biocompatible polymers allows a simultaneous integration of 3D-shaped electrodes to ensure precise dielectrophoretic separation processes in case of stretching or twisting the system. Furthermore, an additional simulation premised on Finite-Element-Method (FEM) is carried out for validation. In addition, the process capability is verified by development of a first rudimentary prototype.