Far field pattern control of single high order transverse mode VCSEL with micromachined surface relief

We demonstrated a single-lobe far field pattern of a GaAs single high-order mode VCSEL with surface micromachined relief. A fiber coupling efficiency was dramatically improved by introducing the phase-shift on the surface. The proposed single-mode VCSEL is promising for use in high speed data links of 10 Gbit/s or beyond as well as in optical data storage.