Analysis of driving ability of bimorph-type bending actuators synthesized by hydrothermal method

Lead zirconate titanium solid-solution (PZT) thin films with various thickness were synthesized on titanium substrates by repeated hydrothermal treatments. The Young modulus, electric-field-induced displacement and density of the PZT film were measured respectively. Bimorph-type bending actuators were fabricated using these films. The model, which is used to analyze the driving ability of bimorph-type bending actuators by hydrothermal method, was set up. It can be seen that the driving ability of bimorph-type bending actuators can be greatly improved by optimizing the thickness of PZT thin film and substrate from the theoretical analysis results. The measured values are expected to agree with the theoretical values calculated by the above model.