Abstract:
The measurement of high electric field is widely used in applications such as power grid, electrical equipment, space launch, petroleum industry, and meteorological monit...Show MoreMetadata
Abstract:
The measurement of high electric field is widely used in applications such as power grid, electrical equipment, space launch, petroleum industry, and meteorological monitoring. Traditional electric field measurement methods, such as field mills, are bulky and cause electric field distortion. In this article, we presented a trampoline-shaped microelectric field sensor (E-sensor) based on microelectromechanical system (MEMS). The micro E-sensor uses the effect of electrostatic induction, which generates force that drives the vibration of a piezoresistive film and converts the electric field into a differential voltage signal. The presented E-sensor can measure both ac and dc high electric fields with relatively high resolution and wide range. Through experimental measurement, the device exhibits an ac resolution of 172 V/m/Hz1/2 and a linear measurable electric field range of 312 V/m to over 700 kV/m. The presented E-sensor has good performance with mm-level size and low cost, which could be mass produced for broad applications.
Published in: IEEE Transactions on Industrial Electronics ( Volume: 69, Issue: 12, December 2022)
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- IEEE Keywords
- Index Terms
- Electrical Measurements ,
- High Electric Field ,
- Electric Field Measurements ,
- High-field Measurements ,
- Electric Field Sensor ,
- Measurement Range ,
- Power Grid ,
- Electrical Equipment ,
- Petroleum Industry ,
- Traditional Measurement Methods ,
- Film Thickness ,
- Electrostatic Forces ,
- Chemical Doping ,
- Advantages Of Low Cost ,
- Vacuum Packaging ,
- Metal Film ,
- Lock-in Amplifier ,
- Waveform Generator ,
- DC Electric Field ,
- Microfabrication Technologies ,
- Advantages Of Small Size ,
- Wheatstone Bridge ,
- Wafer Surface ,
- Straight Shape ,
- Stiffness Coefficient ,
- Device Layer ,
- Electric Field Force ,
- Film Sensor
- Author Keywords
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Electrical Measurements ,
- High Electric Field ,
- Electric Field Measurements ,
- High-field Measurements ,
- Electric Field Sensor ,
- Measurement Range ,
- Power Grid ,
- Electrical Equipment ,
- Petroleum Industry ,
- Traditional Measurement Methods ,
- Film Thickness ,
- Electrostatic Forces ,
- Chemical Doping ,
- Advantages Of Low Cost ,
- Vacuum Packaging ,
- Metal Film ,
- Lock-in Amplifier ,
- Waveform Generator ,
- DC Electric Field ,
- Microfabrication Technologies ,
- Advantages Of Small Size ,
- Wheatstone Bridge ,
- Wafer Surface ,
- Straight Shape ,
- Stiffness Coefficient ,
- Device Layer ,
- Electric Field Force ,
- Film Sensor
- Author Keywords