SENSELET++: A Low-cost Internet of Things Sensing Platform for Academic Cleanrooms

Sensory IoT (Internet of Things) networks are widely applied and studied in recent years and have demonstrated their unique benefits in various areas. In this paper, we bring the sensor network to an application scenario that has rarely been studied - the academic cleanrooms. We design SENSELET++, a low-cost IoT sensing platform that can collect, manage and analyze a large amount of sensory data from heterogeneous sensors. Furthermore, we design a novel hybrid anomaly detection framework which can detect both time-critical and complex non-critical anomalies. We validate SENSELET++ through the deployment of the sensing platform in a lithography cleanroom. Our results show the scalability, flexibility, and reliability properties of the system design. Also, using real-world sensory data collected by SENSELET++, our system can analyze data streams in real-time and detect shape and trend anomalies with a 91% true positive rate.