Advancements in indirect Time of Flight image sensors in front side illuminated CMOS

We will present major advances in Time of Flight (ToF) image sensors for consumer applications. Several innovative elements integrated into a 130nm front side illumination CMOS node reveal superior sensor performance so far only attributed to much more complex backside illumination technologies. The gate controlled pixels comprising deep trenches, buried mirrors and integrated prisms, reveal high quantum efficiency and modulation transfer function (MTF) close to the physical pixel size. In-pixel common mode suppression prevents saturation even under backlight conditions. The comprehensive System on Chip integrates high speed ADCs, a flexible phase shifter, as well as current monitoring for laser safety.