Capacity calculation of an AGV system in a MP2 wafer fab by means of simulation

The transport of wafers inside a multiprocess multiproduct wafer factory is a complex logistic process. In Philips' MOS-3 waferfab this transport is carried out by a so-called automated guided vehicle (AGV) system. In this paper a dynamic model is presented of the AGV system of MOS-3. The advantages of creating such a model are twofold. First of all, the model can be used to analyse the logistics, layout, algorithms and behaviour of the current AGV system. Secondly, the model can analyse and optimise possible changes that can be made to the AGV system in the future.