Multi-Layer Nanoelectromechanical (NEM) Memory Switches for Multi-Path Routing

Monolithic three-dimensional (M3D) multi-layer nanoelectromechanical (NEM) memory switches are experimentally demonstrated for reconfigurable multi-path routing. The multi-layer NEM memory switch has moving mechanical beams in different metal layers which operate independently in a nonvolatile manner, including high impedance states. For example, double-layer NEM memory switches implement nine different memory states. It is predicted that our proposed
${n}$
-layer NEM memory switches utilizing
${n}$
metal layers will exhibit
$3^{({n}-{1}{)}}\text{x}$
higher routing flexibility and
${n}\text{x}$
higher chip density than conventional single-layer NEM memory switches.