Temporal evolution of the IEDF in a pulsed electron-beam driven plasma

Summary form only given, as follows. Obtaining the ion flux characteristics is perhaps the most important first order measurement that can be made in a process plasma. Practically every plasma process currently being employed in industry is highly dependent on the density, energy, and composition of the ions. At NRL, we have been experimenting with electron-beam produced plasmas as an alternative to radiofrequency driven discharges. Currently, multiple diagnostic techniques are being used to better characterize their ion fluxes. We present measurements of the ion energy distribution function (IEDF) from a pulsed electron beam plasma produced in a 20/spl times/1 cm sheet by a 2 kV hollow cathode. The IEDF is obtained using a gridded energy analyzer. We compare the IEDF during the "beam on" and afterglow periods, and the IEDF of the flux impinging on the surface of an RF powered electrode. Typical operating conditions are 15-20 millitorr of argon, oxygen, or nitrogen and 150 Gauss magnetic field.