Study on the Effect of Assembly Errors on the Electrostatic Tuning Ability in Micro Umbrella Shell Resonators

This paper investigates the effects of resonator-electrode assembly errors on the electrostatic tuning ability in micro umbrella shell resonators. Theoretically analyzed the resonator-electrode capacitance effect, which refers to the stiffness adjustment of the shell by applying a voltage between the electrode and the shell. Then the electrostatic tuning models are established in the COMSOL Multiphysics, including spherical, cylindrical and bottom electrodes. Based on the electrostatic tuning models, two resonator-electrode assembly error models are established, including parallel moving error and tilting error, and the capacitance change between the resonator and the electrode caused by assembly errors is studied by finite element method. The simulation results show that the parallel moving error affects the electrostatic tuning ability of the spherical and cylindrical electrodes more than that of the bottom electrodes, while tilting error has less effects on the electrostatic tuning ability of the spherical and cylindrical electrodes compared with that of the bottom electrodes.