Sheet Resistance Measurement of Thin Metal Films Using Reflection-Mode THz-TDS

Micro four-point probe technology can reliably be used to measure the sheet resistance of thin metal films, with great accuracy and repeatability. In this work, we investigate the suitability of using reflection-mode teraherz time-domain spectroscopy for the same task. The agreement between the two methods places reflection-mode terahertz time-domain spectroscopy as a viable tool for thin metal film analysis.