A Method of Performance Degradation Evaluation for Micro/Nano Motion Systems

The performance evaluation and life prediction of mechanical equipment are always concerned by people. However, there are few researches on the reliability of micro nano motion system. In this paper, system stiffness is skillfully used to evaluate performance degradation and predict lifetime of micro/nano motion systems. Besides, an experiment for a nano positioning stage was carried out to verify the feasibility of the model and predict the residual useful lifetime. Therefore, this work has great prospects and significance in real applications of micro/nano motion systems.