91.5%-Efficiency Fully Integrated Voltage Regulator with 86fF/μm2-High-Density 2.5D MIM Capacitor

We present a 91.5% power-delivery-efficiency for high performance computing (HPC) systems including a 1/2- ratio charge pump circuit with 2.5D MIM capacitor. With high capacitance density (86 fF/μm
²
, 1.36-V bias/10 year/100°C), 0.1% parasitic impact, and small form factor (~μm thick), this MIM solution enables converters with high ratio (up to 1/5 with 82% efficiency), high power density (4.8 W/mm
²
for ratio=1/3), low V
OUT
(0.7 V), and sub-ns response for HPC systems.