CO2Gas Sensing By Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption

CO
2
gas sensing responses are measured using our in-house fabricated CMOS-MEMS ScAlN-based pyroelectric detector with 12% Sc doped concentration. Leveraging on mid-IR absorption behavior of CO
2
gas caused by interaction of CO
2
with light at 4.26 µm wavelength, our ScAlN-based pyroelectric detector successfully detect CO
2
gas response ranging from CO
2
concentrations of 5000 ppm down to 200 ppm. Gas channel lengths are varied from 6 cm to 10 cm and their respective CO
2
responses are measured. Finally, with N2 as the reference gas, we calculate the gas response percentage change of CO
2
gas at different gas channel lengths and concentration.