Fabrication of $\mu\ \text{TEGs}$ Based on Nano-Scale Thermoelectric Material Dispersions

This paper features a simple, cost-effective fabrication of nano-material-based thermoelectric microgenerators employing MEMS technology in combination with material processing. The design considerations for this device are discussed and a performance analysis of the produced is described. A vertical integrating 8 thermocouples of Bi0.5Sb1.5Te3 (p-type) and Bi2Te2.7Se0.3 (n-type) was fabricated on a PCB substrate with metal interconnects. Characterization of the fabricated device showed a maximum output power of at 7.9 K, equivalent to an output power density of, proving the feasibility of the concept.