Micromechanical Vibro-Impact Resonator-Enabled Sensing Applications

Micromechanical vibro-impact resonators, for which the devices operate in the highly nonlinear region where the resonator structures physically impact the output electrodes or stoppers, have enabled various unique applications beyond the timing and frequency references that use regular linear resonators. In particular, resoswitches, which utilize vibro-impact resonators with conductive structures to achieve periodic electrical switching, have been demonstrated in cases of receiving RF signal [1]–[6] and sound wave [7] with zero standby power needed. In addition, the contact surface dependent nonlinear dynamics of vibro-impact resonators has shown the potential in setting up a new metrology platform to perform on-chip, in situ surface condition monitoring for MEMS device sidewall surfaces [8] [9]. By going through the developments of the above mentioned vibro-impact devices and circuits, this paper discusses the worklist that needs to be done in moving the technology forward.