Surface Treatment on ESD For SC200 Superconducting Proton Cyclotron

A set of gas nitriding coating device suitable for the electrostatic deflector (ESD) of cyclotron is designed. Using this device, the TiN coating on small electrode of titanium alloy coupons was carried out in the mixture of nitrogen and ammonia. The effects of nitriding temperature and time on the reaction results were studied, the results of the coating experiment were analyzed, and the surface treatment parameters suitable for gas nitriding TiN coating on the surface of the titanium alloy electrode of the ESD were obtained. X-Ray Diffraction (XRD), scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS) were used to characterize and analyze the properties of nitrided coatings. And a high voltage discharge experiment was performed on the sample to measure its dark current. The results show that under atmospheric pressure, annealing temperature of 900 °C, and holding time of 8 h, the coating conditions of titanium alloy electrode materials has the best performance.