Sh Waves In A Functionally Graded Piezoelectric Semiconductor Thin Film

Propagation properties of SH waves in a functionally graded piezoelectric semiconductor (PSC) thin film is investigated. On the basis of the theory of elastic dynamics and PSC, the governing equations with respect to displacement component, potential, and disturbance carrier concentration functions are established. The power series method is employed for solving the system of ordinary differential equations with variable coefficients, and the dispersion equation is obtained analytically. The influence of mechanical parameters, electrical parameters, and density on dispersion curves is discussed. The results obtained should provide a theoretical basis for the design of acoustic wave devices made of PSC and nondestructive testing technology for PDC.