Optimal Design of a Light Operated Micromanipulation Based On Opto-Electrostatic Repulsive Actuator

In order to solve the accuracy problem of the conventional microgripper causing by the external vibration for the connecting power supply with wires, a novel opto-electrostatic repulsive actuation mechanism and mode for driving microgripper is proposed, which can achieve remotely non-contact control and wireless energy transfer. Firstly, the principle of opto-electrostatic repulsive mechanism is presented and introduced, the opto-electrostatic repulsive force activated by PLZT ceramic is derived. To obtain the maximum tip displacement of microgripper, the opto-electrostatic repulsive actuated unit is optimized. Based on which the parameters of the proposed light operated microgripper are determined, and then the optimized unit is simulated by COMSOL software.