Fully automated real-time recipe verification : SM: Smart Manufacturing, APC: Advanced Process Control

The verification of a new or changed recipe is a common process control task in a semiconductor factory. It is also a prime example of the demanding integration challenges that Advanced Process Control (APC) is facing today. State-of-the-art process control solutions must be fully integrated with the work-in-progress (WIP) fabrication control solutions to enable full automation and to find the optimal tradeoff between competing Fab Key Performance Indicators (KPIs). The recipe verification presented in this paper illustrates a holistic strategy that brings these areas together.