Non-Volatile Multiport DC–30 GHz Monolithically Integrated Phase-Change Transfer Switches

This paper reports two configurations of non-volatile multiport transfer switches based on the phase change material (PCM) germanium telluride. The monolithic transfer switches are developed in-house using a custom microfabrication process designed to operate over a wideband dc-30GHz. A C-type switch configuration is presented with two operational states in a highly miniaturized package with the device core area under 0.09mm². A unique, highly versatile multiport R-type switch configuration is proposed with three operational states that offers improved system flexibility, reducing the number of switches for routing. The R-type switch configuration has a device core periphery under 0.2mm². The presented devices are compared with the current state-of-the-art switch technologies. The transfer switches exhibit a measured insertion loss of less than 1.5dB, return loss better than 18dB, and +35.5dBm measured power handling capability with switching speed less than 2 μs.