The nanoscale electrical imaging by using the near-field microwave microscopy method

The scanning near-field microwave microscope (SNMM) was developed to qualitatively image the nanoscale electrical properties of materials at the microwave frequency range. The microwave probe was designed based on a quartz tuning fork (TF) glued with the electrochemically etched metal wires. The sensitivity and signal-to-noise-ratio of the measurement were improved by a two-port interferometric matching circuit. A standard grating sample was measured to validate the topography resolution and the microwave imaging function of this system.