On-chip Miniaturized Terahertz Filter with Half Mode Substrate Integrated Waveguide

This paper shows a miniaturized on-chip passive filter for terahertz communication systems. The filter is implemented with complementary split resonator ring (CSRR) on the half mode substrate integrated waveguide (HMSIW), and the commercial electromagnetic simulation software is applied to optimize the structural parameters to achieve the filtering function and miniaturization, and the improved optimal size of this filter is only 800 × 340 um. The simulated results show that the center frequency is 185GHz, the bandwidth is 3%, and the minimum insertion loss input is 6 dB. The CSRR structure miniaturizes the filter which can be applied in on-chip terahertz communication systems.