Internet-based remote sensing and manipulation in micro environment

Recent developments in the Internet have significantly increased the human capability to reach and obtain information from remote locations. In parallel, the advent of micro sensors and actuators makes it possible for humans to sense and act in a microenvironment. Combined, the Internet and MEMS will produce a new technology for humans to sense and act in remote microenvironments, allowing the potential development of micro teleoperation and micro automation technologies. These new technologies have potential impact on several fields, including remote micro automation and biomedical engineering. In this paper, we will present our ongoing development of polyvinylidene fluoride (PVDF) sensors that can be used for force-reflective control of micromechanical devices over the Internet. Internet based teleoperation between Hong Kong and Michigan State was demonstrated using an event-based control scheme, which ensured stability and synchronization. Control was enhanced by multimedia feedback, which included, in addition to the traditional video, force feedback. The force fed back augmented the limited information supplied by visual feedback. We believe this project will eventually make a great impact to the globalization of MEMS foundries because it will allow global users to micro-assemble and micro-manipulate surface micromachined devices from their laboratories, and hence, reduce the time from design to production significantly.