Effect of Electrode Thickness and Spacing in the Sensing Capabilities of Surface Acoustic Wave Delay Lines

The effect of electrode thickness, electrode spacing and configurations on the resonance frequency of X-Y Lithium Niobate (LiNbO₃) delay line using commercial finite element analysis tool ANSYS is presented for the first time in this study. The series of simulations is carried out for different electrode materials-Aluminium, Copper and Gold. Each of the parameters has an impact on the resonance frequency and by the careful design of these parameters, the appropriate delay line can be realized for applications such as filters, sensors and actuators.