Characterization of Fabry Perot Interferometer based Pressure Sensor of Range 100 mbar

Stainless Steel (SS) or Ni based alloys are the most widely used diaphragm materials in conventional electromechanical pressure sensor especially for critical industrial applications. But Fabry Perot Interferometer (FPI) based pressure sensors with metal alloy mirror/diaphragm are under reported, and the reporting of their characterization is even scarce. The pressure sensor, with SS diaphragm, of range 0-100 mbar is discussed in this paper with more focus on the experimental studies for testing and its characterization. The FPI gap changes from 103.87 µm and 45.88 µm with 100 mbar applied pressure. Non-linearity, hysteresis, and repeatability, in terms of % of FSO, were 0.615, 0.215, and 0.26 respectively. To the best of our knowledge, characterization of such optical interferometer based pressure sensor is reported for the first time.