Research of AC Electrical Properties of ZrC Nanocomposite Produced by Magnetron Sputtering

This paper presents the results of research of the electrical properties of nanocomposite layer with the composition ZrC. The nanocomposite sample were produced by magnetron sputtering. Temperature and frequency dependencies of conductivity, frequency factor, capacity, phase shift angle, tangent of dielectric loss angle and permittivity were determined in the work. The electrical properties of nanocomposite sample were tested using AC current from 50 Hz up to 5 MHz at a measurement temperature from 15 K to 375 K. Studies have shown that the conductivity increases with the measuring temperature, which means that the nanocomposite has a dielectric type of conductivity. Negative values of the phase shift angle on the frequency dependence indicate the capacitive nature of the nanocomposite.