Design of an RLC oscillator based on CMOS technology for gas sensor applications

In this study we present the design of spiral inductors based on a commercial 180 nm CMOS technology from the Taiwan Semiconductor Manufacturing Company (TSMC). The inductors are implemented into a RLC oscillating circuit with a resonance frequency of 4.7 kHz for the stimulation of a cantilever resonator using a Volatile Organic Compound (VOC) detector. In accordance with the obtained results from the electric simulations of the RLC oscillator, there is a bandwidth of 159.5 Hz, a quality factor of 29.66 and a used silicon area of 372.72m
²
.