Fabrication and interface reaction of Y-Ba-Cu-O superconducting thin films by reactive ion beam coating

Y-Ba-Cu-O superconducting thin films have been fabricated by the reactive ion beam coating technique with good reproducibility. The influence of atom stoichiometry on the critical temperatures of the films is determined. Ba and Cu atoms diffusing into substrates were detected by auger electron spectroscopy and Rutherford backscattering. A thin silver film deposited on ZrO/sub 2/ substrate as a buffer layer can effectively retard the interface reaction.<>