Structural Design and Simulation Analysis of Silicon Micro Triaxial Wheel-ring Gyroscope

Micromechanical gyroscope is one of the important applications of attitude control platform and inertial navigation system. However, domestic gyroscope research and development is not highly integrated at present, and the main research focuses on the design of micro-gyroscope with a single detection axis (especially z-axis detection). In order to realize the monolithic triaxial gyro which can be used in the field of intelligent ammunition, a wheel ring gyro structure is designed. The gyro structure was modeled on the SolidWorks software, and then modal analysis, transient impact response analysis and harmonic response analysis were carried out in the finite element analysis software ANSYS respectively. According to the natural frequency of each mode, the structure size of the gyroscope is optimized. Through the simulation results, it is observed that the frequency split between the working modes is relatively small, and the structure has high mechanical sensitivity. The transient impact simulation of the gyro structure shows that the maximum stress of the sensitive structure under the impact of 10000g@5ms is 394.34Mpa, which proves that the structure has good impact resistance.