Laser Processing for Creating Nano-Polygon Arrays

Nanometer-sized polygonal pits were created on a silicon plate by the laser ablation and the alkaline etching processes. A spherical aberration of the lens as well as an off-focus laser irradiation generated a small beam spot over a long distance, which was useful for creating the nano-textures. A silicon plate with a nano-pit array exhibited a reduced reflection loss in the infrared.