Optimal Cut of Quartz Crystal/FeGaB RF Magnetic Sensors

The heterostructures made of magnetostrictive and piezoelectric layers have been recently investigated for the application of magnetic sensors and antenna. In this paper we investigate the possibility of FeGaB thin film on quartz crystal substrate with different orientations of quartz layer. Response of magnetic FeGaB/AlN nanoplate resonator under RF magnetic excitation was simulated by finite element program COMSOL. The results were compared with available experiment and confirmed the validity of available material properties of FeGaB thin film and current simulation method. Quartz/FeGaB composite resonator structures based on different modes of vibration were studied. Quartz/FeGaB resonator based on in-plane extensional modes was found to have a large magnetoelectric coupling effect. These findings can be used to design RF magnetic sensors based on Quartz/FeGaB bilayer plate.