Distributed Ferromagnetic Enhanced Inductively Coupled Plasma for Large-Scale Plasma Processing

Low-frequency inductive discharges with enhanced magnetic coupling are considered to be a promising solution for large-scale plasma processing. Here we present the results of experimental and numerical investigation of a distributed ferromagnetic enhanced inductive discharge in argon/chlorine mixture, performed for a large discharge chamber with a volume of about 200 liters in the pressure range of 0.1-10 Pa at the driving frequency of 100 kHz.